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 Novel technologies of crystallization and post-annealing Metal Induced Crystallization and Polysilicon Thin Film Transistors.
Наименование:

Novel technologies of crystallization and post-annealing Metal Induced Crystallization and Polysilicon Thin Film Transistors.

автор Bo Z. издательство Книга по Требованию Организация здравоохранения
Cтраниц 84        мягкая обложка       
Аннотация:Particularly, it is the first time to report the application of flash lamp annealing technology in the fabrication of low temperature polysilicon and TFTs. These technologies include YAG laser post-annealing and flash lamp post-annealing. Metal induced crystallization (MIC) is one of the methods to obtain high quality polysilicon films at low temperatures. However, low temperature polysilicon has been proposed and considered to be a promising alternative technology. Novel post-annealing technologies are also introduced to reduce the micro-defects in MIC polysilicon film and hence to achieve better performance. A few technologies are presented in this monograph, which improve the quality of MIC polysilicon film and hence the performance of TFTs built on. Amelioration of MIC processes has been made to produce high performance polysilicon TFTs using solution based MIC (SMIC) and defined-grain MIC (DG-MIC) methods. Nowadays,active-matrix addressing using a-Si TFTs is dominating in the flat panel display markets.
Автор: Bo Z.
Издательство: Книга по Требованию
Год:2009
Цена:
1980 руб
Нет в наличии
Поиск: Novel technologies of crystallization and post-annealing Metal Induced Crystallization and Polysilicon Thin Film Transistors.
НОВЫЙ ГОД СИМВОЛ 2013 ГОДАУКРАШЕНИЯ
КАРНАВАЛ НА НОВЫЙ ГОД РАСПРОДАЖА
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