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 Diffusion Characteristics Of Copper In Novel Metallic Films
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Diffusion Characteristics Of Copper In Novel Metallic Films

автор ABHISHEK G. издательство Книга по Требованию Прочие виды транспорта
Cтраниц 276        мягкая обложка       
Аннотация:The primary emphasis of this research was to synthesize different microstructures of these films like amorphous, nanocrystalline, textured polycrystalline and single crystalline films, and to study the effect of these microstructures on their mechanical and electrical properties and on diffusion characteristics of Cu. Microstructures ranging from nanocrystalline to single crystalline TiN films on Si(100) substrates were synthesized by Pulsed Laser Deposition technique by varying the substrate temperature from 25°C to 650°C. Effect of microstructures of these films on their mechanical and electrical properties, and on diffusion behavior of Cu was analyzed. Experimental techniques like XRD, TEM, HRTEM, STEM-Z, EELS, SIMS and four-point probe resistivity measurement were used for in-depth analysis. The goal of this work was to synthesize refractory materials like TiN, Ta and alloys of TiN-TaN in the form of thin films which are used as diffusion barriers in integrated circuits to prevent diffusion of Cu into the Si substrate.
Автор: ABHISHEK G.
Издательство: Книга по Требованию
Год:2009
Цена:
3233 руб
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Поиск: Diffusion Characteristics Of Copper In Novel Metallic Films



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