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 Tantalum Oxide Thin Films for Embedded Capacitors. Using Pulsed DC Reactive Sputtering
Наименование:

Tantalum Oxide Thin Films for Embedded Capacitors. Using Pulsed DC Reactive Sputtering

автор PUSHKAR J. издательство Книга по Требованию Прочие виды транспорта
Cтраниц 212        мягкая обложка       
Аннотация:The validity of the developed design space is experimentally verified with Ta2O5 thin films over a wide range of film thickness. Various processing and integration challenges in depositing thin films using reactive sputtering and their effects on electrical performance of thin-film capacitors are discussed. This research explores and establishes the leverages of using thin film embedded capacitors over currently used surface mount discrete capacitors. Embedded capacitor technology, where thin film capacitors are integrated at on-chip and/or off-chip levels, offers high packaging densities and improved electrical performance at potentially reduced costs of capacitor fabrication and integration. A design space for breakdown voltage and capacitance density of planar capacitors is established, with film thickness and material dielectric constant as parameters. An experimentally verified analytical model for pulsed dc reactive sputtering of Ta2O5 films is described and evaluated. In particular, this work focuses on developing pulsed dc reactively sputtered tantalum oxide (Ta2O5) thin film capacitors for IC chips and packages.
Автор: PUSHKAR J.
Издательство: Книга по Требованию
Год:2008
Цена:
3233 руб
Нет в наличии
Поиск: Tantalum Oxide Thin Films for Embedded Capacitors. Using Pulsed DC Reactive Sputtering
НОВЫЙ ГОД СИМВОЛ 2013 ГОДАУКРАШЕНИЯ
КАРНАВАЛ НА НОВЫЙ ГОД РАСПРОДАЖА
Ортомолекулярная медицина Orthomol Устрание причин заболеваний. Ортомоль это новый метод для лечения и профилактики болезней. Orthomol - ортомолекулярная медицина.
Фотография /english/

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